Product advantages:
The cutting line width is narrow (taking ultraviolet dicing as an example: including HAZ ≤ 30 ± 5 μm) , small edge collapse ≤ 10 μm
- High processing efficiency
UPH ≥ 15 (take 40mil, 5-inch GPP wafer as an example, including automatic loading and unloading)
- Good processing stability
Nanosecond laser has high power stability and good beam quality (M ² < 1.5)
Sample display:
Front positioning, front cutting: 4-inch flat wafer, grain
Front positioning, back cutting: 5-inch GPP wafer