Product advantages:
- Applicable to a variety of wafers
Suitable for 4-8 inch wafers, substrates, epitaxial wafers and patterned wafers
- Can detect a variety of defects
Detect particles, pits, bumps, scratches, stains, cracks and other defects
System resolution: 1-10 μ m
No pattern wafer: 180 seconds / wafer when the number of defects is less than 200
Sample display:
Sample 1
![defect detection machine](../upload/20220819/62fefa1595a3f.png)
Sample 2
![defect detection machine](../upload/20220819/62fefa1c07fb4.png)
Sample 3
![defect detection machine](../upload/20220819/62fefa235340b.png)